JPH0316324U - - Google Patents
Info
- Publication number
- JPH0316324U JPH0316324U JP7647289U JP7647289U JPH0316324U JP H0316324 U JPH0316324 U JP H0316324U JP 7647289 U JP7647289 U JP 7647289U JP 7647289 U JP7647289 U JP 7647289U JP H0316324 U JPH0316324 U JP H0316324U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- gas
- holes
- ejection holes
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 4
- 239000012159 carrier gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7647289U JPH0316324U (en]) | 1989-06-28 | 1989-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7647289U JPH0316324U (en]) | 1989-06-28 | 1989-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0316324U true JPH0316324U (en]) | 1991-02-19 |
Family
ID=31617974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7647289U Pending JPH0316324U (en]) | 1989-06-28 | 1989-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316324U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017056155A1 (ja) * | 2015-09-28 | 2017-04-06 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置および記録媒体 |
-
1989
- 1989-06-28 JP JP7647289U patent/JPH0316324U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017056155A1 (ja) * | 2015-09-28 | 2017-04-06 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置および記録媒体 |
| JPWO2017056155A1 (ja) * | 2015-09-28 | 2018-06-28 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置および記録媒体 |
| US10287680B2 (en) | 2015-09-28 | 2019-05-14 | Kokusai Electric Corporation | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium |